BRONKHORST EL-FLOW Classic Series Instruction Manual

Please read this Instruction Manual carefully before installing and operating the instrument.

Not following the guidelines could result in personal injury and/or damage to the equipment.

Table of Contents

Thermal mass flow meters/controllers (53 pages)

Thermal mass flow meters/controllers (4 pages)

Pressure meters and controllers for gases and liquids (4 pages)

Mass flow controllers (40 pages)

(ultra) low flow coriolis mass flow meters / controllers (65 pages)

Digital mass flow, pressure controllers for gases (33 pages)

Surface mount system for digital mass flow / pressure meters and controllers (26 pages)

Analog mass flow meters / controllers (11 pages)

Page 1 Instruction Manual EL-FLOW® Classic series Thermal Mass Flow Controllers Doc. no.: 9.17.085D Date: 18-09-2018 ATTENTION Please read this Instruction Manual carefully before installing and operating the instrument. Not following the guidelines could result in personal injury and/or damage to the equipment.
Page 2 Subject to technical and optical changes as well as printing errors. The information contained in this document is subject to change at any time without prior notification. Bronkhorst High-Tech B.V. reserves the right to modify or improve its products and modify the contents without being obliged to inform any particular persons or organizations. The device specifications and the contents of the package may deviate from what is stated in this document.
Page 3 Bronkhorst® Warranty Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the date of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physical damage.
Page 4 Bronkhorst® Instruction Manual EL-FLOW® Classic series 9.17.085D.